Ellipsomètre Spectroscopique Woollam : M-2000™

L'ellipsomètre Woollam M-2000™ utilise la méthode brevetée dite RCE (Rotating Compensator) pour obtenir des mesures très précises et une grande résolution. La méthode RCE est compatible avec la détection par spectrophotomètre à caméra CCD afin de détecter simultanément toute la gamme spectrale.

Grâce à une conception modulaire, le M-2000™ peut être fixé directement sur votre chambre de dépôt ou sur n'importe quel set-up dit "ex-situ". 

Why an M-2000?
Advanced Ellipsometer Technology
The M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.

Fast Spectral Detection
The RCE design is compatible with advanced, proven CCD detection to measure ALL wavelengths simultaneously.

Wide Spectral Range
Collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.

Flexible System Integration
With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of our table-top bases.

Accuracy
Advanced design ensures accurate ellipsometry measurements for any sample.

Paramètres mesurables :

• Epaisseur de couche
• Indice complexe du matériau
• Rugosité d'interface
• Coefficients de la matrice de Mueller
• Dépolarisation des couches étudiées

Applications : 

• Optical Coatings

Characterize both thickness and refractive index for single- and multi-layer coatings; anti-reflection, high-reflection, or decorative coatings. Calculate the color coordinates for your coating stack under different lighting conditions.

• Chemistry/Biology

The M-2000 can be used for a variety of chemical and biological applications, either as a stand-alone tool or in combination with one of our many accessories. Study materials under liquid ambient, at high or low temperatures, or in conjunction with QCM-D measurements.

• Conductive Organics

Great progress has occurred in the area of organic layers and stacks used for display (OLED) or photovoltaic applications. There are many different materials being studied, from small molecules such as Alq3 to conjugated polymers such as P3HT. Often multiple materials are blended together – which requires the wide spectral range of the M-2000 – to probe different wavelengths where the organics are optically different. Long-chain molecules may also have significant anisotropy, where orientational stacking of the polymer chains produces different optical constants in different directions.

• Semiconductors

Traditional ellipsometry applications are still going strong. Characterize any semiconductor material: resists, photomasks, SiON, ONO stacks, low-k dielectrics, high-k gates, SOI, SiGe, II-VI and III-V ternary and quaternary compounds.

Caractéristiques :

• Usage ex-situ (goniomètre) ou in-situ (sur bâti) ou encore en ligne
• Ellipsomètre à compensateur tournant (RCE)
• Conception modulaire avec un large choix de configurations
• Gamme spectrale maximale : 193 -1690 nm
• Possibilité d'automatisation complète (angle d'incidence, XY, Z, auto-tilt, mapping)