The SQ-100 Series SQUIGGLE motor is a patented piezoelectric motor for nanopositioning in the research lab, in semiconductor testing, and in manufacturing. The SQ-100V Series [...] + informations
SQ & SQL Squiggle motors: SQ-100V
The SQ-100 Series SQUIGGLE motor is a patented piezoelectric motor for nanopositioning in the research lab, in semiconductor testing, and in manufacturing. The SQ-100V Series motor is vacuum-compatible to 10-7 Torr, for in-vacuum alignment without mechanical feed-throughs.
Product characteristics :
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Stroke range (mm): 15-50
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Stall force (N): 5
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Resolution (nm): 20
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Speed range (mm/s): 0,001-2
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Diameter (mm): 9,5
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Length (mm): 36,6
