EVA300 Compact and modular evaporation – sputtering system

An optimized conception which guarantees the quality of your research for a cost-effective investment.
Coatings responding to your quality standards.
A wide choice of substrate holders adapted to your process.
Several processes for flexibility in your research :
Evaporation : Joule effect sources, electron gun,
Sputtering : cathode magnetron or diode,
Combined solution available.
Highly capable control panel for easy use :
2 types of backing pumps : dry or rotary roughing,
3 types of secondary pumps : turbomolecular, diffusion or cryogenic pumps.