More Precision.
laser optical eddy current confocal capacitive draw-wire inductive infrared

Sensors, systems and solutions for displacement and temperature measurement.

Measurement Product Guide 2011

More precision. Sensors, Mehr Präzision. measurement devices and systems Sensorik, Messgeräte und Systeme
As a technological leader in its industry, Micro-Epsilon is constantly meeting the challenges of developing high precision sensors, measurement equipment and systems for its customers. This challenge represents the continued drive for high performance in the field of measurement technology. Behind Micro-Epsilon is a powerful group of companies that provide strategies that focus on different sensor technologies, facilitating the group`s leadership in this field. Along with a concentration of expertise in sensors for geometrical and dimensional measurement, our latest technology focuses on non-contact temperature measurement instruments. In combination, the different members of the Micro-Epsilon group interact with one another to meet every challenge and meet every customer requirement. As well as physical resources, the accumulated knowledge within the company is regarded as the core capability that provides a technological lead and consolidates this for the future. It is only through consistent knowledge management that such sustainable high performance can be achieved and incorporated into all product groups. From large global corporations through medium-sized companies to engineering service providers - sensors and solutions from Micro-Epsilon are regarded throughout the world as symbolic for reliable measurement results of the highest precision.

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Table of Contents
Sensors for displacement, distance, length and position
Laser triangulation sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6 - 7 Confocal-chromatic sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8 - 9 Gauging and distance sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 - 11 Capacitive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 - 13 Eddy current sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 - 15 Inductive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 - 17 Draw-wire sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 - 19

2D/3D sensor systems for dimensional measurement
Laser line profile sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 - 21 Thru-Beam micrometers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 - 23

IR-temperature sensors
Inline IR sensors, thermal imagers & handheld IR instruments. . . . . . . . . . . . . . . . . . 24 - 25

Specific sensor solutions
Application specific and OEM sensor designs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 - 27 Automatic inspection of shiny surfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 - 29 Turnkey systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 - 31

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Mehr Präzision. Application fields Sensorik, Messgeräte und Systeme
The fields of application and demand for precision sensors and measuring equipment are ever increasing. Whether it is for quality assurance, for applications in maintenance and service, for process and machine monitoring, in automation or in research and development - sensors make a vital contribution to the improvement of products and processes. From machine building, automated production lines in the food and beverage industry, to integrated OEM solutions for automotive and aerospace customers - almost all these fields benefit from the use of Micro-Epsilon sensors. A long list of satisfied customers, including BMW, Schenk, Jaguar Cars, NASA, 3L, Exxon, Siemens, Borg Warner, NIST, MIT, Frito Lay, MRSI, Braun, Newport, Boeing, Amat, GSK, LLNL, L3, Ford and many more, prooves the success of these high performance quality products.

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Automation Quality control Process monitoring Process control

OEM-Integration Finished products Vehicles Machines, tools

Sensors and systems for displacement, position & temperature

Research and development Product and process optimisation Experimentation and testrigs Fundamental research in industry

Machines and plants Machine control Process control Predictive maintenance

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Laser-triangulation: Non-contact displacement and position sensors
The non-contact displacement optoNCDT product group utilises optical triangulation as a measuring principle. A laser diode projects a visible spot of light onto the target surface (laser class 2). The light reflected from this spot is directed through an optical receiving system onto a position-sensitive element. Optical displacement sensors measure with a large reference distance and a very small measuring spot diameter. Nearly all models work with a high resolution CCD- or CMOS-line and a DSP . Advantages - Small targets through a tiny spot size - Long measuring ranges - Large stand off - Extreme resolution - Excellent linearity - High measuring rates - Synchronisation of two sensors - Measurement of shiny metallic and rough surfaces

NEW
Largest range in the world Starting with a low cost entry model through to high precision top end sensors ­ optoNCDT sensors are mostly used in process automation and quality assurance applications. Universal controller Processing up to six sensor signals. A versatile controller for a wide range of applications that has extensive clearing functions and high speed bus systems. Sensors with small laser-line compensates for variations in reflections The LL-series is ideal for metallic shiny or rough surfaces. With a small laser-line, this anti speckle sensor compensates reflection variations.

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Performance optoNCDT
10nm 100nm 1µm 10µm 100µm 1mm 10mm 100mm 1m

MEASURING RANGES LINEARITY RESOLUTION

IP69K

NEW

optoNCDT 1302 Compact Low-Cost CMOS sensor with analogue output Measuring ranges Linearity Resolution Measuring rate 20 - 200mm ±0.2% 0.02% 750Hz

optoNCDT 1402 / 1402SC Compact industrial sensor with analogue & digital output Measuring ranges Linearity Resolution Measuring rate 5 - 600mm ±0.18% 0.01% 1.5kHz

optoNCDT 1607 Analogue PSD sensor for high speed measurements Measuring ranges Linearity Resolution Bandwidth 0.5 - 200mm ±0.2% 0.02% 37kHz (-3dB)

IP69K option with stainless steel housing (food grade standard)

NEW

optoNCDT 1700 Intelligent sensor with integrated controller for industrial applications Measuring ranges Linearity Resolution Measuring rate 2 - 750mm ±0.08% 0.005% 2.5kHz

optoNCDT 1700LL Sensor with laser-line for shiny metallic and rough surfaces Measuring ranges Linearity Resolution Measuring rate 2 - 50mm ±0.08% 0.005% 2.5kHz

optoNCDT 1700BL Displacement sensor with blue laser technology for metals & organic materials Measuring ranges Linearity Resolution Measuring rate 20 - 200mm ±0.08% 0.005 % 2.5kHz

NEW

optoNCDT 2200 / 2220 / 2200LL / 2220LL High performance sensor for extremely precise measurements; options for shiny metallic or rough surfaces Measuring ranges Linearity Resolution Measuring rate 2 - 200mm ±0.03% 0.0015% 10kHz / 20kHz

optoNCDT 2300 49kHz laser displacement sensor for extreme dynamic measurements Measuring ranges Linearity Resolution Measuring rate 2 - 100mm ±0.02% 0.0015 % 49kHz

optoNCDT 1710 / 1710-50 / 2210 Short measurement ranges at long standoff distances Measuring ranges Linearity Resolution Measuring rate 10 - 1000mm ±0.03% 0.005% 10kHz

will be available from 12.2011

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Confocal-chromatic principle: Mehr Präzision. Non-contact displacement sensors Sensorik, Messgeräte und Systeme
The optoNCDT 2401 confocal-chromatic measurement system consists of a controller with an LED-light source and a sensor. Both the sensor and the controller are connected via optical fibre up to a distance of 50m. The distance of the focal point varies due to the chromatic aberration of the sensor optics. A certain distance is assigned to each wavelength in the controller. The reflected light from the target surface is passed to the receiver optics, where the spectral intensity dispersion is evaluated. This unique measuring principle enables displacements and distances to be measured with the highest precision. Both diffuse and specular surfaces can be measured. With transparent materials, a one-sided thickness measurement, or gaps between multiple transparent layers, can be calculated along with the distance measurement using just one sensor. Advantages - Extreme high resolution - Target independent measurement - Tiny, constant measuring spot - Compact course of beam - One-sided thickness measurement of transparent materials

Thickness measurement of sleeves Two synchronised sensors acquire the bottom thickness of sleeves in a double-sided layout.

Liquid level The confocal measurement principle facilitates measurements against reflecting surfaces (glass, mirror), as well as liquids.

Surface scanning The extreme spatial resolution in x-axis and the submicron accuracy in the z-axis make it a perfect sensor for surface scanning.

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Performance optoNCDT 2401
1nm 10nm 100nm 1µm 10µm 100µm 1mm 10mm

MEASURING RANGES LINEARITY RESOLUTION

optoNCDT 2401/2431 Controller with additional external light source for high speed measurements Linearity Resolution Measuring rate ±0.05% 0.004% 2kHz / optional 30kHz

optoNCDT 2400/2401 CCD standard sensors with lange stand off distance for standard measurements Measuring ranges 120µm - 24mm Small and huge base distances possible

optoNCDT 2402 Miniature sensors (gradient index lens) for the inspection in tightest spaces Measuring ranges 400µm - 6.5mm Sensors with axial and radial (90° deflection) optical path available

optoNCDT 2403 Confocal hybrid sensors with narrow gradient index lens and relay optics Measuring ranges 400µm - 10mm Enlarged base distances

Confocal miniature sensors Special miniature sensors with a diameter of 4mm measure in confined installation spaces, e.g. in drilled holes and recesses. Furthermore, the 90° version of these sensors enables the inspection of the smallest inner diameter, bores and medical test tubes.

One-sided thickness measurement transparent materials The unique measurement principle enables a singleside thickness measurement on transparent materials even multilayer materials. Here, just one sensor measures the thickness with nanometer accuracy.

Extreme resolution The confocal sensors facilitate optical measurements in sub-micrometer resolution in the x- and y-axis. In this way, the smallest structural changes or displacements can be resolved extremely accurately.

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Time of flight principle: Non-contact gauging and distance sensors
Optoelectronic sensors in the optoNCDT ILR series operate according to the Time-ofFlight principle and are designed for non-contact distance and displacement measurements. The 118x Series functions according to the phase comparison principle. In doing so, modulated laser light is permanently transmitted to the object. The receiver compares the phase offset of the transmitted signal with the received signal, enabling the distance to be precisely calculated. All remaining models in the optoNCDT ILR series operate according to the Time-of-Flight principle. Here, a laser pulse is transmitted and the time it takes for the reflected pulse to arrive back at the sensor is precisely measured. The distance can be measured based on the speed of light and the measured time period. Depending on the application and the required measuring range, the sensors operate on diffuse reflecting surfaces or on a special reflector plate. Advantages - Extreme long measuring ranges - Outstanding repeatability - Fast response time - Excellent price-performance ratio - Various interfaces

Position acquisition storage and retrieval units Fast response time in combination with high measurement accuracy facilitate the exact positioning of storage and retrieval units.

Distance measurement on monorail conveyors To control the flow of production and to prevent damage to the parts, the spacing between the conveyors is monitored.

Acquisition of coil diameters The quantities of steel, paper and fabric wound on and off are monitored via the acquisition of coil diametres using laser probes.

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Performance optoNCDT ILR
1mm 10mm 100mm 1m 10m 100m 1000m 10 000m

MEASURING RANGES LINEARITY REPEATAbILITY

optoNCDT ILR 1030/1031 Distance sensors Measuring ranges no reflector 0.2 - 8m with reflector 0.2 - 50m Linearity Repeatability Response time ±20mm <5 mm 10ms

optoNCDT ILR 102x/110x/115x Gauging sensors / Distance sensors Measuring ranges Gauging 0.2 - 10m with reflector 0.2 - 250m Linearity Repeatability Response time Measurements against target (without reflector) ±3mm ±2mm 12ms

optoNCDT ILR 1181/1182/1183 Distance sensors Measuring range Linearity Repeatability Response time 0.1 - 150m ±2mm <0.5mm 20ms

Measurements against a reflector, which is installed on the measuring object reflector

up to 300m

ILR 6m

1020 ·

1030

1100 ·

1150up to 3000m 1101 1021 1031

1151

1181

1182

1183

1191

optoNCDT ILR 1191 Distance sensors Measuring range Linearity Repeatability Response time 0.5 - 3000m ±20mm <20mm 0.5ms

Measuring range in gauging mode (without reflector)

8m 10 m 30 m 300 m 30 m 50 m

· · · · · · · · · · · · · ·

Measuring range in reflector mode

150 m 250 m 3000 m

Time-of-Flight

sensors

are

particular-

ly useful in filling level measurement, for safety applications, height measurement of lifting systems, overhead conveyors, crane systems and for positioning lifts. The optoNCDT ILR 1191 is specially designed for outdoor use and in port systems. 11

Non-contact capacitive displacement and position sensors
Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the target. The measurement technique enables measurements against all conducting and semiconducting objects. Micro-Epsilon has extended the capacitive measurement principle with some innovative functions, which enable highly linear output characteristics, nanometerprecise resolution and very stable measurements to be obtained. The linear characteristic of the measurement signal is obtained for measurements with respect to target objects of electrically-conducting materials without any additional electronic linearisation. The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for test-rig applications. Advantages - Superior precision and resolution - Excellent temperature stability - Outstanding long-term stability - Material-independent for metallic targets - For any conductive target / semi-conductive target

The world`s smallest capacitive displacement measurement system: capaNCDT 6019 for OEM applications in machines and equipment.

Even under extreme conditions on a test-rig, capacitive sensors supply the highest precision here, the wear on a brake disc is being measured.

Capacitive displacement sensors measure with the highest precision the alignment of the lens system used for semiconductor wafer lithography.

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Performance capaNCDT
0.1nm 1nm 10nm 100nm 1µm 10µm 100µm 1mm 10mm

MEASURING RANGES LINEARITY RESOLUTION 100mm

capaNCDT 6019 Miniature single-channel system Measuring ranges Linearity Resolution Bandwidth 0.2 - 10mm ±1% 0.015% 500Hz (-3dB)

capaNCDT 6100 Compact single-channel system Measuring ranges Linearity Resolution Bandwidth 0.2 - 10mm ±0.3% / ±0.1%* 0.01% 2kHz (-3dB)

capaNCDT 6300/6310 High resolution single-channel system Measuring ranges Linearity Resolution Bandwidth 0.05 - 10mm ±0.2% / ±0.1%* 0.001% 8kHz (-3dB)

capaNCDT 6350 High speed single-channel system Measuring ranges Linearity Resolution Measuring rate 0.2 - 10mm ±0.3% 0.005% 50kHz

capaNCDT 6500 Modular multi-channel system Measuring ranges Linearity Resolution Bandwidth 0.05 - 10mm ±0.05%* 0.000075% 8.5kHz (-3dB)

Specific sensors for OEM applications Micro Epsilon can customize a sensor to fit your individual needs: - adjusting the body shape and size for mounting - modify the sensor material - cable arrangements and miniaturizing - cryogenic or high temperature environment - integrated electronic and sensor for OEM design

* Sensor and controller are matched

Instant sensor replacement without recalibration Micro-Epsilon`s unique capacitive technology enables the replacement of any capaNCDT sensor in seconds! Replacing sensors with different measuring ranges and any capaNCDT controller can be done without recalibration. Replacing a capaNCDT sensor takes no more than 5 seconds, while other capacitive systems in the market are not designed for replacing components and so individual calibration and linearisation is normally required. The nominal range of each single probe can be extended two-fold and custom cable lengths are also available. Non-contact target grounding Target grounding sometimes can be very difficult or even impossible. Unlike conventional systems, due to the unique synchronisation of two Micro-Epsilon sensor systems, the target does not require any electrical grounding. The principle on the right shows two synchronised capaNCDT sensors measuring roller run-out. The target does not need to be grounded because of the unique synchronised, non-contact-grounding technology. At the same time, any interference caused by electrostatic discharge of the target is eliminated. 13
sensor sensor controller controller

Instant sensor replacement within 5 seconds! Replace any capaNCDT controller and any capaNCDT sensor within seconds without recalibration!

sync.

No target grounding is required with capaNCDT sensors!

Eddy current principle: Non-contact displacement and position sensors
Eddy current displacement sensors measure distances, displacements, or positions of any electrically-conductive target. The principle enables non-contact and wear free measurements. The measurement objects can have either ferromagnetic or non-ferromagnetic properties. Due to its immunity to oil, dirt, dust, moisture, interference fields, etc. the eddy current principle is ideally suited to applications in harsh industrial environments. Micro-Epsilon´s eddy current sensors are the only ones with active temperature compensation and field calibration capabilities.
Temperature error by comparison Temperature error (% FSO)
10 8 6 4 2 0 10 20 30 40 50 65 °C

Advantages - Non-contact and wear free - Highest resolution and linearity - Very stable measurements - High measurement rates - Excellent temperature range and temperature stability - For industrial applications

Temperature error (% FSO)
10 8 6 4 2 0 10 20 30 40 50 65 °C

Temperature error (% FSO)
10 8 6 4 2 0 10 20 30 40 50 65 °C

Common inductive sensor with ferrite core

Common eddy current sensor without temperature compensation

Best practice: eddyNCDT 3010 with temperature compensation

OEM integration in textile machines Eddy current sensors measure the thickness variation of thread in textile machines.

Application in test rigs In the automotive industry these systems measure internal dimensional changes inside a running engine.

In-line quality control Eddy current sensors measure the flatness in rolling mills.

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Performance eddyNCDT
0.1nm 1nm 10nm 100nm 1µm 10µm 100µm 1mm 10mm 100mm

MEASURING RANGES LINEARITY RESOLUTION

eddyNCDT 3010 Low-Cost single channel system for industrial applications Measuring ranges Linearity Resolution Bandwidth 0.5 - 15mm ±0.25% 0.005% 25kHz (-3dB)

eddyNCDT 3300 Intelligent eddy current system (singlechannel) for very precise measurements Measuring ranges Linearity Resolution Bandwidth 0.4 - 80mm ±0.2% 0.005% 100kHz (-3dB)

eddyNCDT 3700 Compact eddy current OEM system for differential measurements Measuring ranges Linearity Resolution Bandwidth 0.5 - 6mm ±5% 0.000018% 10kHz (-3dB)

Standard and miniature sensors available

The largest selection of sensors world-wide The technological leadership in eddy current sensors, which spans many years, is reflected in the sensor range - more than 400 sensors are available in different versions for the most varied of applications. Subminiature sensors for confined installation spaces Apart from standard sensors in popular styles, miniature sensors can also be supplied that achieve high precision measurement results with the smallest possible dimensions. Pressure-resistant versions, screened housings, ceramic types and other special features characterise these sensors, which achieve highly accurate measurement results despite their small dimensions. The miniature sensors are employed in high pressure applications, e.g. in internal combustion engines. The subminiature sensors are matched to the controller of the eddyNCDT 3300 Series. Suitable for extreme temperatures The sensors can be used from -50°C up to +235°C. The wide temperature range and the insensitivity to soiling or dust, offers an enormous range of applications in industrial
World leading technology The family of EU05 and ES04 miniature eddy current displacement sensors is unbeatable in dimensions. The very fine integral coaxial cable can pass through the eye of a needle. These sensors are ideally suited for measurements in combustion engines.

environments. Whereas most eddy current sensors on the market today exhibit extreme drift with variations in the ambient temperature, Micro-Epsilon`s eddyNCDT systems have an active temperature compensation that ensures optimum signal stability. Consequently, measurements can be carried out over large temperature ranges with extreme reliability and accuracy. 15

Linear inductive displacement and position sensors
Electromagnetic displacement sensors are used extensively in applications for automated processes, quality assurance, test rigs, hydraulics, pneumatic cylinders, and automotive engineering. The advantages of these displacement sensors are well known and highly valued, and include ruggedness, reliability under harsh conditions, high signal quality and good temperature stability. The electromagnetic sensors of the induSENSOR series are based on the well-proven inductive and eddy current principle. They are used successfully both in single and high volume OEM applications. Advantages - More than 250 different models with measuring ranges from 1 to 630 mm - Controller integrated or separate - High accuracy classes - Extreme stability and robustness - Different constructions with plunger, tube or measuring ring - High temperature stability

In automated production plants, inductive sensors monitor the production tolerance of the products while the process is running.

To monitor the clamping position of tools, a VIP series sensor is integrated into the chuck and directly measures the clamping stroke of the drawbar.

Inductive gauging sensors measure the geometry of workpieces in quality assurance and production.

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Performance induSENSOR
100nm 1µm 10µm 100µm 1mm 10mm 100mm 1m

MEASURING RANGES LINEARITY RESOLUTION

induSENSOR series VIP Displacement sensors with integral electronics Measuring ranges Linearity Resolution Bandwidth Target 50 - 150mm ±0.25% 0.03% 300Hz (-3dB) measuring ring

induSENSOR series LVP - DC Displacement sensors with integral electronics Measuring ranges Linearity Resolution Bandwidth Target 50 - 200mm ±0.25% 0.03% 300Hz (-3dB) plunger

induSENSOR series EDS Displacement sensors with integral electronics Measuring ranges Linearity Resolution Bandwidth Target 100 - 630mm ±0.3% 0.05% 150Hz (-3dB) tube

Pressure resistance 450bar

induSENSOR series LVDT Gauging sensor with external electronics Measuring ranges ±1 - ±10mm Linearity Bandwidth Target ±0.15% 300Hz (-3dB) plunger with return spring

induSENSOR series LVDT Displacement sensors with external electronics Measuring ranges Linearity Bandwidth Target ±1 - ±25mm ±0.15% 300Hz (-3dB) plunger

induSENSOR series LDR Linear displacement sensors with external electronics of high temperature (up to 160°C) Measuring ranges Linearity Bandwidth Target 10 - 50mm ±0.3% 300Hz (-3dB) plunger

principle plunger

principle measuring ring

principle tube

Extended functionality The induSENSOR product group offers extended functionality and properties as a substantial advantage compared to conventional inductive probes and sensors. The versions in the series differ from one another in construction, accuracy class and therefore also in their fields of application. The sensors are designed with integral or external electronics and use a plunger, measuring sleeve and measuring tube as the target. As a result, new fields of application are opening up due to the versatile methods of installation. This is particularly noticeable with the VIP Series: the difference from conventional LVDT sensors is that with the VIP Series, the measurement object is mounted parallel to the sensor. Parallel mounting is primarily suitable for confined installation spaces. Through the short measuring sleeve concept, the sensors can be integrated to form a mechanical unit with dampers, valves, automatic screw driving units, clutches or pedals. 17
sleeve movement induSENSOR target movement Compact through parallel mounting

Draw-wire sensors for displacement, position and length
Draw-wire displacement and position sensors are essentially electronic tape measures and measure the linear movement of a component using a wire made of highly-flexible stainless steel strands, which is wound onto a drum by means of a long-life spring motor. The measuring drum is axially coupled with a multi-turn potentiometer, an incremental encoder, or an absolute encoder. With the draw-wire principle, a linear movement is transformed into a rotary movement and then converted into a resistance change or into countable increments. Advantages - Very accurate - Long measuring ranges - Robust and compact - Easy installation and handling - Compact design - Excellent price/performance ratio

Draw-wire displacement sensors measure the lifting height on forklift trucks. With its compact construction, users can acquire lifting heights of up to 30m.

Miniature draw-wire sensors monitor the satellite release process from the Ariane booster rocket.

Draw-wire sensors monitor the height of lifting platforms on automobile production lines.

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Performance wireSENSOR
1µm 10µm 100µm 1mm 10mm 100mm 1m 10m 100m

MEASURING RANGES LINEARITY RESOLUTION

wireSENSOR MK30/MK46/MK77/MK120 OEM miniature sensors Measuring ranges Analogue output Digital output 50 - 7500mm potentiometer encoder

wireSENSOR MPM Subminiature sensors Measuring ranges Analogue output 50 - 250mm potentiometer

wireSENSOR MP/MPW Miniature sensors Measuring ranges Analogue output 100 - 1000mm potentiometer

Option with wire acceleration up to 100g

Option with protection class IP67

wireSENSOR P60/P96 Industrial sensors Measuring ranges Analogue outputs Digital outputs 100 - 3000mm potentiometer, voltage, current HTL, TTL, SSI, PB, CO

wireSENSOR P115 Industrial sensors Measuring ranges Analogue outputs Digital outputs 3 - 15m potentiometer, voltage, current HTL, TTL, SSI, PB, CO

wireSENSOR P200 Longrange sensors Measuring ranges Digital outputs 30 - 50m HTL, TTL, SSI, PB, CO

wireSENSOR mechanics The mechanical options P96, P115 and P200 series are designed for easy mounting of a customer-specific encoder.

Compact, dependable and economical The different sensor model ranges cover the complete application spectrum of draw-wire sensors. The miniature sensors are very favourably priced and are suitable for integration in tight installation spaces due to the miniaturised design. The industrial sensors are of extremely rugged construction and are employed in applications with large measurement ranges. A clear advantage of this draw-wire measuring principle is that the measuring cable can be diverted over deflection pulleys. This property differentiates draw-wire sensors from other measuring principles which normally only measure on one axis. The sensor housings are kept extremely compact. The well-conceived sensor design enables large measurement ranges to be realised in a space-saving manner. Since only high quality components are used, the rugged sensors have an extremely long life - even in continuous use under industrial conditions.

Application with pulley wheel

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Laser-Line Triangulation: Non-contact 2D/3D profile sensor
The scanCONTROL laser-line profile sensor makes use of the triangulation principle for the two-dimensional acquisition of profiles on the most varied of target surfaces. In contrast to familiar point laser sensors, a line optical system projects a laser line onto the surface of the object to be measured. The back-scattered light from the laser line is registered on a sensor matrix. Along with distance information (z-axis), the controller also calculates the true position along the laser line (x-axis) from the camera image and outputs both values in the sensor two-dimensional coordinate system. A moving object or sensor will generate a three-dimensional representation of the object. Advantages - High accuracy and profile frequency - High performance signal processor - Trigger and synchronisation options - Different types for customised integration available - Complete solution from Micro-Epsilon

Laser-line Diffuse Reflection

Sensor array pixel

Calibrated Measuring points X/Z (mm)

scanCONTROL 2710/2810 is designed to measure beading and grooves and is suitable for stationary operations e.g. mounted on a conveyor belt and also for moving targets e.g. on a robot arm. Therefore, different surfaces can be measured with high precision.

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scanCONTROL COMPACT (2700) Compact laser scanner for calibrated profiles Measuring ranges z-axis x-axis Linearity z-axis Resolution x-axis Profile frequency up to 300mm up to 148mm ±0.2% 640 points/profile up to 100Hz

scanCONTROL HIGH-SPEED (2750/2800) Fast laser scanner for calibrated profiles Measuring ranges z-axis x-axis Linearity z-axis Resolution x-axis Profile frequency up to 300mm up to 148mm ±0.2% 1024 points/profile up to 4000Hz

scanCONTROL SMART (2710/ 2810) SMART scanner for profile analysis Measuring ranges z-axis x-axis Linearity z-axis Resolution x-axis Profile frequency Data rate up to 300mm up to 148mm ±0.2% 1024 points/profile up to 4000Hz 265,000 points/sec

scanCONTROL Configuration Tools - Can be used with all scanCONTROL sensors - Full function with scanCONTROL 2710/2810 series - Integrated setup tools for setting up the sensor - Combining individual measuring tasks. Choosing from over 20 measuring programs - Configuring the measuring programs with mouse interaction directly in the profile - Configuring the analogue and digital outputs of each sensor

scanCONTROL 3D-View - Can be used with all scanCONTROL sensors - Viewing online and offline sensor data in 3D - 2D export of profile sequences (png) - 3D export (asc,stl) for CAD programs - Intensity of each point can be displayed and exported

Integrating scanCONTROL in application software - FireWire IEEE 1394a DCAM ­ standard v1.30 - Ethernet GigE Vision - LLT.DLL and SDK and library for integration in C/C++ and C# - CMU module for ICONNECT - Example VIs for NI LabVIEW using LLT.DLL or NI IMAQdx

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Thru-Beam principle: Optical micrometer
Optical micrometers in the optoCONTROL Series are based on various measuring principles. Apart from the CCD camera technique using laser or LED lighting, the principle of light quantity measurement is used. The micrometers consist of a light source and a receiver or a CCD camera. The light source produces a parallel, continuous light curtain, which is lined up with the receiver. If an object interrupts the light curtain, this shadow or darkening is detected at the receiver unit. The optoCONTROL 1200 Series acquires the incident quantity of light, whereas the 1202, 2500 and 2600 Series measure the exact shadow via a CCD array. In this way, dimensional quantities such as diameter, gap, position and segment can be acquired. These units use state-of-the-art, high speed CCD cameras with solid state technology, which eliminate measurement errors caused by traditional scanning laser micrometers. Advantages - Various models for different applications - Laser- or LED light source - Extremely compact construction - Very accurate measurements - High speed measurements

During the stamping of threaded rods, micrometers are used for quality assurance in order to determine the exact thread guidance.

Optical micrometers are used for acquiring roller gaps to ensure a constant gap height.

Synchronised micrometers acquire the vibration of tensioned steel lift cables, in order to control the vibration behaviour.

22

optoCONTROL 1200 Miniature high-speed micrometer (laser) Measuring ranges Linearity Resolution Bandwidth Integrated controller 2 - 30mm ±40µm (independent) 10µm 100kHz (-3dB)

optoCONTROL 1202 Compact high-speed micrometer with large measuring range (laser) Measuring ranges Linearity Resolution Bandwidth Integrated controller 75 and 100mm ±144µm 30µm 800Hz (-3dB)

optoCONTROL 2500 High resolution micrometer (laser) Measuring ranges Linearity Resolution Measuring rate External controller 0.5 - 34mm ±10µm 1µm 2.3kHz

Innovative dual sensor system To determine material thickness, a sensor system consisting of a micrometer and an eddy current sensor is fitted
optoCONTROL 2600 High resolution micrometer (LED) Measuring ranges Linearity Resolution Measuring rate External controller 0.3 - 40mm ±3µm 0.1µm 2.3kHz

above a roller. The eddy current sensor measures the reference distance to the roller and the micrometer acquires the web surface. The material thickness is calculated from the combination of the two signals.

Detecting fast-moving parts in processes Apart form measurement tasks, the 1200 Series can be employed for ascertaining the presence of components. The versatile concept with enormously high cut-off frequency and compact design opens up numerous fields of application.

Measuring transparent materials The 2600 Series uses LED light sources to achieve high measurement accuracy. Along with the excellent performance data, the 2600 Series is suitable for measurement against transparent objects, such as glass bottles, bulbs or test tubes. The acquisition of transparent and extremely thin materials is simplified due to the adjustable edge detection threshold.

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Non-contact infrared temperature sensors and thermal imagers
Infrared thermometers determine the temperature of objects by non-contact measurement of the infrared radiation emitted by the object`s surface. A detector converts the incoming infrared radiation into an electrical signal. This results in an aligned temperature value, which can be used for further processing. The use of either portable or inline infrared thermometry sensors opens up various opportunities to measure and display temperature processes in the fields of quality control, automation systems and maintenance of machines and large plants. Trend setting infrared sensor technology for process automation Miniaturized IR sensors thermoMETER combine high accuracy of the sensor parameters, ruggedness up to 250°C ambient temperature, a state of the art stainless steel mechanical design and an affordable price. New developed IR detectors with high sensitivity and small dimensions make outstanding measuring parameters such as response times of 1ms possible. Sophisticated infrared thermometers support a high quality level in the production process. Advantages - Easy to use - Non-contact measurement without contaminating the object - Enables inspections of hot, fast moving or hard to reach objects in hazardous environments

Crosshairs precision module Optomechanical device of the LS and mapping of the laser line generators.

Industrial automation Control and monitoring of process temperatures and product quality.

Electrical and mechanical maintenance, R&D Inspections of electrical systems, switch cabinets, bearings and motors.

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thermoMETER MS Portable low-cost IR thermometers Temperature ranges from -32°C up to 760°C thermoMETER LS Portable IR thermometers with laser crosshairs Temperature ranges from -35°C up to 900°C Focus of 1mm spot size, 75:1 optics Crosshairs mark real spot size at any distance

thermoMETER CS / CSmicro / CX / CSLaser Compact or micro sized IR sensors, low-cost, fully integrated Temperature range: -40°C to 1600°C Rugged coated silicon optics Integrated electronics Scalable analogue output: 0 - 10V or 0 - 5V Smallest integration, ideal for OEM High resolution model available

thermoMETER CTratioM1 Glass fibre ratio thermometer Temperature range: 700°C to 1800°C Ambient temperatures up to 250°C continuous without cooling Insensitive to changes in emissivity of the target 5ms response time for fast readings

thermoMETER CTlaser Most precise sensor with laser aiming Temperature range: -50°C to 975°C Infrared sensors with 75:1 optical resolution Smallest spot size 0.9mm Double laser aiming marks real spot location and spot size at any distance Measuring times from 9 ms

thermoMETER CTlaser M1/M2/M3 For metal processing with reduced wavelength: 50°C to 1800°C thermoMETER CTlaserGLASS For glass measurement: 100°C to 1650°C thermoMETER CTlaserCOMBUSTION For measurement of flames: 200°C to 1450°C

thermoIMAGER TIM Thermal imager for industrial applications Temperature ranges: -20°C to 900°C Very compact construction Exchangeable lenses with 6°, 23° and 48°FOV Power supply and operation via USB 2.0 interface Excellent thermal sensitivity (NETD) of 0.08 K Analogue input and output, trigger interface

thermoMETER CT Most economic and accurate Temperature range: -50°C to 975°C One of the smallest infrared sensors worldwide with 22:1 optical resolution Up to 180°C ambient temperature without cooling thermoMETER CTP7 For thin plastic film materials from 0°C to 500°C

thermoMETER CTM1/M2/M3 For metal processing, Temperature range: 50°C to 1800°C thermoMETER CThot For extreme environmental conditions up to 250°C ambient temperature without cooling thermoMETER CTXL Non contact temperature measurement from 100°C to 1800°C in laser processing applications Complex image analysis and process monitoring software with custom configuration

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Innovative sensor solutions for specified applications
Apart from standard sensors utilising the various measuring principles, Micro-Epsilon has developed numerous sensor solutions for special applications, which go beyond pure displacement and position measurement. These application-specific sensors have been developed and optimised for special measurement tasks at the request of customers. These developments incorporate the company`s expertise gained from more than thirty years designing, developing and applying sensor systems. Here, the developments always focus on high performance and reliability - at favourable price-performance ratios for OEMs.

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NEW

ILU-50 OEM sensor Integrated load and imbalance sensor for washing machines Measuring ranges 50mm For OEM applications

Sensor system for bore/hole inspection Measure dimensions of bore holes: Diameter, roundness, concentricity, ID-profiling, straightness Sampling rate of up to 30kHz From 4mm bore diameter

DZ135 Speed sensor for turbochargers - for vehicle and test cell use Speed range from 500 to 400,000rpm Wide operating temperature range

combiSENSOR Non-contact displacement and thickness measurement with only one sensor In its sensor housing the combiSENSOR combines two measurement principles, e.g. laser and eddy current

vacCONTROL Vacuum monitoring system for cans, jars and bottles Non-contact principle Easy integration in production lines

ascoSPEED 5500 Non-contact speed and length sensor for measurements in the metal industry Measuring ranges 1-3000 m/min (adjustable) LED light source

SGS Spindle Growth System Measurement system developed for measuring the extension of high speed milling spindles Measuring ranges 400µm Resolution 0.5µm High temperature range

NLS Needle Lift System Miniature sensor system for measuring the needle lift in fuel injectors Innovative measurement concept Wide temperature range (240°C) Extreme pressure environment (2000bar)

idiamCONTROL Non-contact inspection of extruder bores Non-contact and wear-free measurement Suitable for all metals without additional calibration Exact, non-destructive inspection

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Automatic inspection of shiny surfaces
The reflectCONTROL product line is used for the automatic inspection of reflecting surfaces. Based on the principle of deflectometry, the mirror image of a light-dark pattern of the surface to be inspected is recorded by cameras and evaluated. The process is extremely sensitive to differences in the curvature of the target surface structure and can therefore automatically locate and display the smallest defects in an otherwise smooth surface. The appropriate system is available for numerous applications: RC-Compact for laboratory applications and routine inspections in production; RC-Robotic if the complexity of the examined parts requires flexible positioning of the sensor unit; and RC-Custom for a customised solution for the application, with complete integration in the respective production environment. Advantages - Defects are discovered and classified automatically - Modular design enables use in the production line and as laboratory equipment - Provides OK / NOT OK decisions, evaluations and defect reports - Surface resolution can be adjusted down to the micrometre range

Previous visual inspections are replaced by the completely automatic reflectCONTROL.

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RC-Compact All the required components for rapid inspection are contained in one compact housing. Inspection of flat and slightly curved parts Intuitive user interface Scalable to object sizes and measuring processes Ideal for small series in the laboratory and production processes Attractive price/performance ratio

RC-Robotic This system is for repeatable inspections when the size or geometry of the components to be inspected require flexible positioning of the sensor unit. Ideal for complex components Intuitive user interface Use of several robots simultaneously enables complete scanning in the production cycle Automatic marking unit option

RC-Sensor Sector-independent solution for the surface inspection of any components. Customised system based on defined customer requirements Complete integration in the production line Freely definable defect classification and evaluation Optimisation of resolution, field of view and measuring time

Types of defects detected (extract) Impressions, contact, inclusions, fluff / hair, adhesive residues, mottles, craters, scratches, paint delamination, paint drops, runs, pinholing, overspray, moulding defects, scoring, shell defects, slide marks, abrasion marks, welding beads, spitters, specks, partial / missing paint, soiling, water droplets. 29

Measuring systems

System solutions from Micro-Epsilon are measurement systems that go beyond pure sensor systems. In this respect, sensors, software and the mechanical system are blended together to form one integrated overall system, which is used for process monitoring and quality assurance on production lines. The sensor and software modules used originate from the Micro-Epsilon group, enabling optimum and efficient component matching. These turnkey automated measurement systems are integrated into existing or newlydesigned process lines to execute fully automated applications, such as thickness measurement, surface inspection and parts classification.

For each measurement task there is a suitable measurement concept. As well as laser sensors, micrometers, eddy current and capacitive sensors, image processing solutions, special combined sensors are also used. The signal representation can be arranged to suit the application requirements. The measurement systems communicate with existing environments over various interfaces and can therefore also be integrated retrospectively into existing production lines.

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Inspection systems for the glass industry Systems for quality assurance in glass production: Measurement of surface, contour, curvature and thickness of glass and plates.

Inspection systems for the plastics industry Inspection systems for non-contact and non-radiating thickness measurement in the production of plastics.

Inspection systems for metal processing Innovative measurement and inspection systems for thickness, profile and surface measurement of metals.

Inspection systems for rubber and tyres Measurerment and inspection systems for thickness and profile measurement of tyres and other rubber products.

Automotive inspection systems Inspection systems for quality assurance and production monitoring of single or integrated parts.

Geometrical inspection of silicon ingots Inspection system for automatic surface inspection and geometrical measurement of ingots prior to the cropping process.

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Modifications reserved / Y9761185-B071031DGO

Micro-Epsilon Headquarters Koenigbacher Str. 15 · 94496 Ortenburg / Germany Phone +49 (0) 8542 / 168-0 · Fax +49 (0) 8542 / 168-90 info@micro-epsilon.com

www.micro-epsilon.com